金山科研平台现货促销

ULVAC爱发科 双动式真空角阀 VLPｰU20 双作用气缸型

ULVAC爱发科 双动式真空角阀 VLPｰU20 双作用气缸型

ULVAC的真空阀是基于ULVAC在真空领域丰富的技术和经验开发的。从大气压到极高真空，对应广泛的需求提供丰富的系列产品。金山科研平台现货促销特点

SUS角阀可以烘烤至150℃。

连接法兰有4种类型可选择：JIS-VF，ISO-KF，ISO-K和ISO-CF。

提供单动式和复动式2种。 单动式仅需要一个气动管线。

不锈钢材料。 （但是，VLP-U由铁制成，VAP，VAH和VFR由铝制成。）

金山科研平台现货促销规格

Model	VLP-U
Maximum allowable differential pressure on valve plate(Positive pressure) MPa	0.10
Maximum allowable differential pressure on valve plate（Counter pressure） n/a	Not available
Maximum allowable differential pressure in opening direction（Positive pressure） kPa	1.0
Maximum allowable differential pressure in opening direction（Counter pressure） n/a	Not available
Plate seal	O-ring
Feedthrough	O-ring
Actuation	Double-acting cylinder
External leak rate*1Pa・m3/s	≦1.3E-7
Internal leak rate*1Pa・m3/s	≦1.3E-7
Operating pressure range（absolute pressure） Pa	Atm.～1.0E-5
Bakeout temperature(when stopping)*2℃	60
Operating ambient temperature 　℃	5～40
Fluid temperature　℃	5～40
Heating & cooling speed ℃/h	≦30
Operating ambient	Non-corrosive
Fluid	Non-corrosive
Compressed air to cylinder MPaG	0.40～0.55
Warranted operation cycle*3	100,000
Orientation	Vertical
Position indicator	Optional (sell separately)
Material of major parts (Vacuum side)	Steel 400 with Ni plating
Material of major parts (Atmosphere side)	Steel 400 with Ni plating + acrylic painting
Seal material (Vacuum side)	Nitrile rubber
Grease (Vacuum side)	Highly purified paraffin oil
Attachment for lifting	None/td>
RoHS	Complied

■Detail of specification 　VLP-U

Flange	VF500
Conductance in opening position*4　L/s	9,198
Cylinder capacity　cc	9,040
Compressed air fitting	Rc3/4
Operating speed (open)*5　sec	7.0±0.5
Operating speed (close)*5　sec	7.0±0.5
Weight　kg	310
Height dimension (A)　mm	1,530
Center-to-flange dimension (B)　mm	380

*1　Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.*2　Do not open and close during bakeout.*3　See instruction manual for detail.*4　Conductance is based on molecular flow at 20℃ (68F) air.*5　Adjust operation speed to make its value equal to specified value by using a speed controller.